Semiconductor gas sensor and method of manufacturing the same

The semiconductor gas sensor for sensing a gas is disclosed. The semiconductor gas sensor, the first insulating film, a second insulating film, and the sensing electrodes provided on the heating elements, the heating elements upper side provided on the second insulating film provided on the first insulating film provided on the substrate, the substrate having a cavity, and and a sensing membrane covering the sensing electrode. The first insulating film is provided with an exposure hole formed in a portion corresponding to the peripheral portion of the cavity and the cavity. A second insulating film is formed so as to cover the exposed hole, the heating elements are provided in the portions corresponding to the cavity and generates heat. The semiconductor gas sensor is provided with a vent hole formed through the second insulating film, a vent hole is in communication with the exposure hole to dissipate heat of the heating elements below the upper side direction of the substrate. In this way, the semiconductor gas sensor by having the exposure hole and the cavity, it is possible to reduce the degree of bending of the membrane toward the cavity can be rapidly and efficiently release the heat of the heating elements.