Device and method for preventing gas return of reaction chamber

The invention provides a device and method for preventing gas return of a reaction chamber. The device comprises the reaction chamber and a tail gas pump communicated with the reaction chamber; and a one-way valve is arranged between the reaction chamber and the tail gas pump. The method comprises a step of mounting the one-way valve between the reaction chamber and the tail gas pump; and the one-way valve arranged between a butterfly valve and the tail gas pump can block the tail gas at the outside of the reaction chamber immediately in case of an emergent power fault so as to prevent the reaction chamber from being polluted. The invention has the advantages of simple structure and operation, low cost and energy source economization.