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Characterization of laser-fired contacts processed on wafers with different resistivity
Characterization of laser-fired contacts processed on wafers with different resistivity
2003
Grohe
Schneiderlochner
Hermle
Preu
Glunz
Willeke
Walz
Keywords:
Wafer
Optoelectronics
characterization
Aluminium
Silicon
Passivation
Electrical resistivity and conductivity
Laser
Conductivity
Materials science
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