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Interconnection resistance improvement by plasma treatment after etching the contact hole
Interconnection resistance improvement by plasma treatment after etching the contact hole
2012
Nam-Gun Kim
Sung-il Cho
Yoon-Jae Kim
Chan-Min Lee
Ji Hee Kim
Cheol-kyu Lee
Seok-Woo Nam
Keywords:
Plasma
Etching
Interconnection
Materials science
Composite material
plasma treatment
contact hole
Optoelectronics
Correction
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