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A FUZZY AHP-BASED FAULT DIAGNOSIS FOR SEMICONDUCTOR LITHOGRAPHY PROCESS
A FUZZY AHP-BASED FAULT DIAGNOSIS FOR SEMICONDUCTOR LITHOGRAPHY PROCESS
2011
Cw Shen
Mj Cheng
Cheng-Wu Chen
Fm Tsai
Yc Cheng
Keywords:
Machine learning
Control engineering
Analytic hierarchy process
Fuzzy logic
Artificial intelligence
Computer science
Semiconductor
Lithography
hierarchical analysis
fuzzy ahp
lithography process
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