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The micromechanical sensor, sensor group and the method as well as a new use of longitudinal acoustic waves
The micromechanical sensor, sensor group and the method as well as a new use of longitudinal acoustic waves
2005
Heikki Seppae
Kirsi Tappura
Hannu Helle
Tomi Mattila
Aarne Oja
Ari Alastalo
Jussi Tuppurainen
Keywords:
Acoustics
Acoustic wave
Physics
Correction
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