Fabrication of SIMOX Structures and IC’s Test Elements

G. G. Voronin,L. V. Degtyarenko,I. G. Lukitsa,V. G. Malinin,V. V. Starkov,Y. V. Fedorovitch,L. N. Frolov

Fabrication of SIMOX Structures and IC’s Test Elements

1995

G. G. Voronin
L. V. Degtyarenko
I. G. Lukitsa
V. G. Malinin
V. V. Starkov
Y. V. Fedorovitch
L. N. Frolov

This work investigates SIMOX technology and mainly explores tow aspects of it:the development of high-current ion implanter dedicated for use in laboratory environment;the optimization of SIMOX formation process

Keywords:

Ion implantation
Breakdown voltage
Electronic engineering
Materials science
Fabrication
Engineering physics

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