Fabrication of SIMOX Structures and IC’s Test Elements
1995
This work investigates SIMOX technology and mainly explores tow aspects of it:the development of high-current ion implanter dedicated for use in laboratory environment;the optimization of SIMOX formation process
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI