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Effect of Chelating Agent and Ammonium Dodecyl Sulfate on the Interfacial Behavior of Copper CMP for GLSI
Effect of Chelating Agent and Ammonium Dodecyl Sulfate on the Interfacial Behavior of Copper CMP for GLSI
2018
Kai Zhang
Xinhuan Niu
Chenwei Wang
Jianchao Wang
Da Yin
Ru Wang
Keywords:
Copper
Chelation
Ammonium dodecyl sulfate
Chemistry
Inorganic chemistry
Correction
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