Density measurements of diamond-like coatings using a low energy accelerator

Abstract With the aid of nuclear physical methods based on the use of a low energy accelerator it is shown that the density of even a small, uneven and rough diamond-like coating prepared by mass-separated ion beam deposition can be determined reliably. The density of the coating corresponds to that of diamond. Outlines of the used methods, i.e. Rutherford backscattering and/or nuclear resonance shift combined with the use of a profilometer and Doppler shift attenuation, are presented.