Optical interference measuring apparatus
2010
PROBLEM TO BE SOLVED: To provide an optical interference measurement device having a wide measurement corresponding inclination angle, which indicates a maximum inclination of a measurable measuring object.SOLUTION: A reference mirror 33 disposed on a reference optical path is reflected by a plurality of micro mirrors 332 disposed on a reflective surface. The plurality of micro mirrors 332 are arranged so as to correspond to a plurality of light receiving elements included in imaging means, and are configured so that reflected light by each micro mirror 332 enters the light receiving element corresponding to the micro mirror 332. Preferably, the area of the region which the reflected light by the micro mirror 332 enters is made narrower than the area of a light receiving part of the light receiving element.
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