Atomic layer deposition of chromium oxide nanolayers

Chromium oxide nanolayers containing active Cr(VI) groups have been grown on quartz, glass, and glass-ceramic substrates by atomic layer deposition. The effect of process parameters on the composition of the layers, the mechanism of layer growth, and the thermal stability of Cr(VI) has been studied, and the adhesive strength of aluminum and copper films evaporated onto chromium-oxide-modified substrates has been determined.