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Surface roughness and electrical conduction of oxide/polysilicon interfaces
Surface roughness and electrical conduction of oxide/polysilicon interfaces
1986
L. Faraone
G. Harbeke
Keywords:
Oxide
Surface roughness
Polysilicon depletion effect
Inorganic chemistry
Electrical resistivity and conductivity
Surface finish
Chemistry
Thermal conduction
Silicon
Analytical chemistry
surface conditions
electrical conduction
Composite material
Correction
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