Highly sensitive devices for primary signal processing of the micromechanical capacitive transducers

A method of signal processing devices design for micromechanical accelerometers with capacitive transducers is proposed. This method provides the complex solution of the sensibility increasing and noise immunity problems by finding of the difference frequency of signals, which are formed by two identical generators with micromechanical capacitive transducers in frequency control circuits. In this study the analog and digital versions of the highly sensitive signal processing devices circuits with frequency output were developed. The breadboards of these devices are fabricated and studied and the project of their integral realization is designed.