The Electric Field Analysis of the Structure of New Micro-Machined Gyroscope

The structure of current micro-machined gyroscope result in detection error and processing difficulty, which can be reduced by redesigning the structure such as a new type researched here to enhance the accuracy..The new structure for gyroscope and the method of driving force calculating for it is introduced in this paper. A 3D micro-machined gyroscope model has been built through CAD software, while finite model through CAE software. Besides, the driving structure has been analyzed to gain the size of driving force and electric-field distribution.