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Preparation and properties of Y-Ba-Cu-O thin films by RF magnetron sputtering with a dc biased substrate holder
Preparation and properties of Y-Ba-Cu-O thin films by RF magnetron sputtering with a dc biased substrate holder
1991
Satoshi Eto
Tadayuki Kobayashi
Kouichi Usami
Toshinari Goto
Keywords:
Thin film
Sputter deposition
Substrate (chemistry)
Analytical chemistry
High-temperature superconductivity
X-ray crystallography
Ceramic materials
Copper oxide
Crystal structure
Materials science
High-power impulse magnetron sputtering
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