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Impact of hydrogenation process on performance of self-aligned metal double-gate LT poly-Si TFTs
Impact of hydrogenation process on performance of self-aligned metal double-gate LT poly-Si TFTs
2012
Shika
Bessho
Okabe
Ogata
Kamo
Kitahara
Hara
Keywords:
Thin-film transistor
Materials science
hydrogenation process
Annealing (metallurgy)
double gate
Optoelectronics
Logic gate
Hydrogen
Metal
Correction
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