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Bandgap engineering of ternary ZnOxS1-x CdxZn1-xO thin films via atomic layer deposition
Bandgap engineering of ternary ZnOxS1-x CdxZn1-xO thin films via atomic layer deposition
2012
Jukka T. Tanskanen
Jonathan R. Bakke
Carl Hägglund
Tapani A. Pakkanen
Stacey F. Bent
Keywords:
Nanotechnology
Thin film
Ternary operation
Atomic layer epitaxy
Atomic layer deposition
Solid-state chemistry
Band gap
Inorganic chemistry
Materials science
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