Photolithographic Techniques for Surface Acoustic Wave (SAW) Devices.

Abstract : The object of the program is the establishment of a production capability for surface acoustic wave devices of varied design and material for the purpose of meeting estimated military needs for a period of two years after the completion of the contract and to establish a base and plans which may be used to meet expanded requirement. The primary requirement is the pilot line production of devices that are reliable, reproductible, and low cost. The first two phases of this program saw the design, fabrication and tooling of six device types, bandpass, pulse compression and tapped delay line SAW filters on both lithium niobate and ST-quartz substrates. The third phase involved fabrication of a larger quantity (50 ea.) of confirmatory devices which were sampled at a high rate and subjected to rigorous life and environmental testing. The fourth phase of the program is a pilot line production effort of 150 each of the devices scheduled to be delivered. This report describes the extent to which Phases III and IV have been met.