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Formation of Si Nanowire Arrays by Metal-Assisted Chemical Etching
Formation of Si Nanowire Arrays by Metal-Assisted Chemical Etching
2008
Charlotte Benoit-Moez
Stéphane Bastide
Claude Lévy-Clément
Keywords:
Nanowire
Isotropic etching
Reactive-ion etching
Metal
Materials science
Inorganic chemistry
Optoelectronics
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