In Situ XPS Study of Interaction of Thin IVA, VA Metal Films with Native Oxide on Si Substrates

Phase formation and change in morphology of Ti, V and Nb oxide films on (100)Si and (111)Si, with native oxide layer, have been studied by XPS in situ. The metal oxides were formed by the interaction at room temperature in UHV multistep deposited of Ti, V or Nb with native oxide. The formation of clean silicon regions during the growth of three-dimensional metal oxide islands is discussed. Differences observed in composition of Nb oxides on (100) Si and (111) Si are considered.