Old Web
English
Sign In
Acemap
>
Paper
>
Dielectric SiO$_{2}$ Planarization Using MnO$_{2}$ Slurry
Dielectric SiO$_{2}$ Planarization Using MnO$_{2}$ Slurry
2012
Sadahiro Kishii
Ko Nakamura
Kenzo Hanawa
Satoru Watanabe
Yoshihiro Arimoto
Syuhei Kurokawa
Toshiro Doi
Keywords:
Dielectric
Analytical chemistry
Chemical-mechanical planarization
Physics
Inorganic chemistry
Slurry
Chemical engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
12
References
0
Citations
NaN
KQI
[]