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Crystalline silicon films sputtered on molybdenum
Crystalline silicon films sputtered on molybdenum
2003
P. Reinig
F. Fenske
W. Fuhs
A. Schöpke
B. Selle
Keywords:
Thin film
Raman spectroscopy
Polycrystalline silicon
Sputter deposition
Analytical chemistry
Molybdenum
Materials science
Crystalline silicon
Inorganic chemistry
Auger electron spectroscopy
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