Nucleation Mechanism for Epitaxial Graphene on Si-Terminated SiC (0001) Surfaces

The nucleation mechanism during the epitaxial graphene films on Si-terminated SiC (0001) surfaces was investigated by atomic force microscopy (AFM) and Raman scattering spectrum. By imaging the change of Si-terminated SiC substrate surfaces, we observed the process of the initial nucleation and the wrinkle formation of graphene. The nucleation of epitaxial graphene phase initiates at 1450°C and the wrinkle formation depends on the thermal decomposition time.