Old Web
English
Sign In
Acemap
>
Paper
>
Electrical investigation of the effect of gas additives on silicon deposition plasmas
Electrical investigation of the effect of gas additives on silicon deposition plasmas
2011
Mark A. Sobolewski
Robert Gordon Ridgeway
Mark Daniel Bitner
Patrick T. Hurley
Dino Sinatore
Keywords:
Plasma
Inorganic chemistry
Silicon
Materials science
Chemical engineering
Deposition (law)
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]