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Optical film formation with O2 cluster ion assisted deposition
Optical film formation with O2 cluster ion assisted deposition
2001
Katsuhiko Shirai
Y. Fujiwara
Ryo Takahashi
Noriaki Toyoda
Shinji Matsui
Teruko Mitamura
M. Terasawa
H. Tsubakino
Ikuho Yamada
Keywords:
Ion beam
Chemical reaction
Ion plating
Thin film
Focused ion beam
Analytical chemistry
Ion beam deposition
Ion
Ion beam mixing
Materials science
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