A laser processing method for plate-shaped workpiece

2015 
A laser machining method includes a mounting step for attaching an adhesive tape to a ring-shaped frame having an opening for receiving the plate-shaped workpiece, and mounting the plate-shaped workpiece on the adhesive tape. The adhesive tape consists of a base layer, an opening formed at one side of the base layer adhesive layer and formed on the other side of the base layer functional layer. The function layer includes fine particles of metal oxide, emulsion particles of thermoplastic resin as a binder, and a dispersing agent. The laser processing method further includes a Laserbearbeitungsnut-forming step of applying a laser beam from a laser beam application to the held on the chuck so that the laser processed groove is formed on the plate-shaped workpiece plate-shaped workpiece and relative feeding of the chuck table and the laser beam application by operating a feeding unit.
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