A Novel Type Compact FBG-Based Micro-Displacement Sensing Machine Using a Temperature-Bias Self-Compensating Technique

The trend towards miniaturisation in manufacturing has led to a requirement for the technique of micro /nano measurements capable of measuring tiny features on small components. This paper presents the development of a new sensing method for micro/nano displacement measurements based on fiber Bragg grating (FBG) sensors. In this machine, some new ideas are integrated into the design, such as the suspended FBG probe stem, the fiber fused microball tip, and the double-FBG probe structure. Test shows the microball tip diameter can be less than 300 um. It has been proved by preliminary experimental results that the measurement resolution can reach 50nm.