1500-element linear MWIR and LWIR HgCdTe arrays for high-resolution imaging

High resolution infrared imaging system calls for very long scanning arrays with several thousands of detectors and high performance. This paper presents the recent technological developments and the electro-optical performances obtained at LETI/LIR (infrared laboratory) on 1500 detector linear HgCdTe arrays working in the 3 - 5 and 8 - 10 micrometer spectral ranges. These very large arrays (length approximately equals 50 mm) have an indirect hybrid architecture composed of butted HgCdTe PV detection circuits and Si CMOS readouts hybridized on a mechanically close-matched fanout substrate. Defect free dicing and butting, respecting the detector pitch, is made by accurate and non damaging techniques.