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Effect of P Concentration on Ti Silicide Formation in In-Situ P Doped Epitaxial Si Films
Effect of P Concentration on Ti Silicide Formation in In-Situ P Doped Epitaxial Si Films
2019
Seran Park
Hyunsu Shin
Eunjung Ko
Dae-Hong Ko
Keywords:
Physics
Condensed matter physics
Doping
Epitaxy
Analytical chemistry
Silicide
In situ
Titanium silicide
phosphorus concentration
Correction
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