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Effect of Oxygen Plasma Irradiation on AlGaN Surface Properties
Effect of Oxygen Plasma Irradiation on AlGaN Surface Properties
2016
Masahito Niibe
Retsuo Kawakami
Yoshitaka Nakano
Ryo Tanaka
Yuma Araki
Chisato Azuma
Takashi Mukai
Keywords:
Radiochemistry
Oxygen
Plasma
Irradiation
Chemistry
oxygen plasma
Materials science
Photochemistry
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