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Gas Sensing Characteristics of MoO3 Thin Films Prepared by Glancing Angle Magnetron Sputtering
Gas Sensing Characteristics of MoO3 Thin Films Prepared by Glancing Angle Magnetron Sputtering
2017
Artur Rydosz
Magdalena Ziabka
Dagmara Michon
Jaroslaw Kanak
W. Maziarz
T. Pisarkiewicz
Keywords:
Thin film
High-power impulse magnetron sputtering
Sputter deposition
Analytical chemistry
Materials science
Optoelectronics
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