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Correlation between in situ optical emission spectroscopy in a reactive Ar/O2 rf magnetron sputterin
Correlation between in situ optical emission spectroscopy in a reactive Ar/O2 rf magnetron sputterin
1998
F. Ayguavives
Buntha Ea-Kim
P. Aubert
B. Agius
J. Bretagne
Keywords:
Analytical chemistry
Thin film
Cavity magnetron
Lead zirconate titanate
Nuclear magnetic resonance
Nuclear reaction analysis
Emission spectrum
Physics
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