OPTICAL PROPERTIES OF THE RAPID ANNEALED OXYGEN-DOPED DIAMOND-LIKE CARBON FILM

The amorphous oxygen-doped diamond-like carbon films were prepared by pulsed laser deposition. Compared with the pure diamond-like carbon film, there were much less graphite clusters on the surfaces of the oxygen-doped diamond-like carbon films, and the average transmission of the oxygen-doped diamond-like carbon films in the medium infrared band increased. However, some new absorption peaks in the infrared spectra of the oxygen-doped diamond-like carbon film were generated. Rapid annealing was experimented to remove the absorption peaks. XPS analysis showed that the fractions of the C–O and C=O bonds that generated the new absorption peaks were reduced more than the fractions of sp3 bonds by rapid annealing at 400∘C, and the absorption peaks in the medium infrared spectra decreased. It indicated that rapid annealing at right temperature during the right time could reduce greatly the absorption in the medium infrared band of oxygen-doped diamond-like carbon films.