A new one-port S-parameter calibration workflow by means of a MEMS-based variable capacitor array

One-port reflection calibration is a widely used technique for RF and microwave VNA measurements in a broad range of applications including on-wafer chip testing, production testing, and microwave imaging. Recent developments in the field of antenna tuning components lead to advanced, highly stable MEMS-based variable capacitors. In this study we present the use of an antenna tuning integrated circuit (IC) for realizing a compact and fast transfer standard for one-port calibration. In contrast to traditional Short-Open-Load methods a new workflow that uses different capacitance states was developed. Together with least-squared-error solving this leads to improved calibration performance. Verification against metrology grade standards showed agreement of less than −45 dB vector difference. In addition, an estimation of the expected S-parameter error due to temperature deviations was performed. The new calibration workflow can be used in applications where multiple ports need to be calibrated fast and accurate.