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Atomic Layer Deposition for Nano-Fabrication of 3D Optoelectronic Devices
Atomic Layer Deposition for Nano-Fabrication of 3D Optoelectronic Devices
2007
Elton Graugnard
Jeffrey S. King
Davy P. Gaillot
C. J. Summers
Keywords:
Atomic layer deposition
Nano-
Optoelectronics
Materials science
nano fabrication
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