DESIGN OF A FULLY INTEGRATED CMOS-PMUT SYSTEM

In this paper we present a full-system (transmitter and receiver) intended to excite and amplify the signal coming from an ultrasonic transducer. The transducer is basically a piezoelectric micromachined ultrasound transducer (PMUT) which will be integrated monolithically over a 0.13 μm high voltage CMOS process. The CMOS circuitry consists of two stages: a high voltage Transmitter, able to actuate the PMUT with a pulsed voltage from 0-32 V at 80 MHz maximum frequency, and a Front-end Amplifier, able to amplify very low signal coming from PMUT with minimum noise.