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Properties of High kappa Gate Dielectrics Gd_2O_3, Y_2O_3, and yttria stabilized ZrO2 for Si
Properties of High kappa Gate Dielectrics Gd_2O_3, Y_2O_3, and yttria stabilized ZrO2 for Si
2001
J. Kwo
M. Hong
Ahmet Refik Kortan
Kate Queeney
Y. J. Chabal Opila
David A. Muller
S. N. G. Chu
B. J. Sapjeta
J. P. Mannaerts
T. Boone
Henry W. Krautter
J. J. Krajewski
A. Michael Sergent
J. M. Rosamilia
T. S. Lay
Keywords:
Yttria-stabilized zirconia
Dielectric
Scanning transmission electron microscopy
Analytical chemistry
Materials science
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