Er :Y2O3 thin films grown by pulsed laser deposition

Abstract Deposition of thin films by pulsed laser ablation from an Er 2 O 3 :Y 2 O 3 ceramic target for waveguide laser application is reported. Erbium-doped yttrium oxide (Er:Y 2 O 3 ) thin films are grown on c-cut sapphire under optimized deposition parameters. The effects of ultraviolet (UV)-assisted annealing of thin Er:Y 2 O 3 films on the structural properties and the morphology are investigated. The films exhibit better crystalline structure and smoother surface after post-deposition treatment. The optical transmission spectra and the waveguiding properties of the thin films are reported. The films exhibit lower absorption and scattering losses after UV-assisted annealing. The light is guided to the end of the treated films with propagation losses ≈2 dB/cm.