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Study of formation of sidewall striation in high aspect ratio hole etching
Study of formation of sidewall striation in high aspect ratio hole etching
2018
Junichi Hashimoto
Mitsuhiro Omura
Takahiro Adachi
Yusuke Kondo
M. Ishikawa
Junko Abe
Takaya Matsushita
Hisataka Hayashi
Keywords:
Materials science
Etching (microfabrication)
Composite material
Striation
Correction
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