An experimental investigation of the theory of electrostatic deflections

Abstract The so-called “pull-in” instability is a ubiquitous feature of electrostatic actuation. In systems where an applied voltage is used to actuate or move mechanical components, it is observed that when the applied voltage exceeds a critical value, electrostatic forces become dominant over elastic forces and the mechanical components “pull-in” or collapse into one another. Here, key theoretical results concerning this instability are surveyed and compared to a new experimental study of electrostatic deflections. Gaps between theory and experiment are uncovered and directions for future modeling and analysis indicated.