Calibration study for quadrupole mass spectrometer with LIP new UHV partial pressure standard

Abstract This study performed the calibration of QMG700 quadrupole mass spectrometer (QMS) against the ultrahigh vacuum (UHV) partial pressure standard. The research object was the sensitivity, noise level and minimum detectable partial pressure (MDPP) in the secondary electron multiplier (SEM) detector mode. This work was investigated in the SCAN and multiple ion detection (MID) operation modes, and scan speed and the dwell time were 50 ms/amu and 50 ms, respectively. The SEM voltage was changed in the range of (1100–3000) V. The experiment was carried out over the partial pressure range of 10−9 Pa to 10−7 Pa using He. The results demonstrated a significant correlation between the QMS metrological characteristics and its operation mode. This study was conducted according to the ISO TS 20175: 2018. The results showed a significant dependence between the metrological characteristics of QMS and its operation mode.