Fabrication of an electro-optic polymer microring resonator

A laterally coupled electro-optic polymer microring resonator was designed and fabricated. The design consists of microrings of 200 μm radius with racetrack structures to improve the coupling between the bus waveguide and the ring. Two different fabrication schemes namely reactive ion etching (RIE) and photodefinition are presented. Thermally grown siliconoxide on conducting silicon was used as the bottom cladding. Passive ring resonance behavior has been demonstrated around 1550 nm. The through port response of the ring showed a maximum extinction of about 12 dB and a finesse of 6.