An Electromagnetically Actuated 3-Axis Gimbal-Less Micro-Mirror for Beam Steering

A 3-axis scanning MEMS mirror has been developed that is driven by Lorentz force. The structure is gimbal-less and made of silicon substrate and aluminium wires and mirror. The actuators embedded in all 4 sides of the mirror enable individual control over the sides. Light beam is directed to an objective point by configuring the involved actuators. The optical tilt angle of the mirror was measured to be 14.5° about Y-axis and 20° about X-axis by consuming 2.3 mW of rms power at resonance mode. A linear vertical motion of more than $\mathbf{200} \mu \mathbf{m}$ was achieved with 75 mW of dc power. All actuators are individually controllable in both static and dynamic mode by applying dc or ac current.