Imprint apparatus and the imprint method

2006 
The molding pattern of the mold 1 a imprint apparatus for transferring onto the molded product 2, the stage 32 and the cover 33 for pressurizing the mold 1 and the object to be molded 2, can be inserted hole stage 32 Yes and a frame body 43 surrounding the stage 32, relative to the first moving means relatively movable stage 32 and the cover 33 in the contact and separation direction, and a cover 33 and the frame body 43 in the contact and separation direction a second moving means 46 movable, cover 33, and any type 1 or the molded product 2, a stage 32, the pressure was reduced and the frame 43, in the constructed vacuum chamber 40, the mold 1 and the molded product a first pressure reducing means 45 for removing the fluid between the two, the second pressure reducing means 35 for removing fluid space formed between the cover 33 and the mold 1 or the molded product 2, in configuring. Thus, it is possible reduce the size of the imprint apparatus, it is possible to reduce the cost.
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