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Patternable low-кmaterial for “greener” semiconductor manufacturing
Patternable low-кmaterial for “greener” semiconductor manufacturing
2010
Qinghuang Lin
S. T. Chen
Alshakim Nelson
Phillip J. Brock
S. Cohen
Blake Davis
Nicholas C. M. Fuller
Jeffrey P. Gambino
Richard Dean Kaplan
R. Kwong
E. Liniger
Deborah A. Neumayer
J. Patel
Hosadurga Shobha
R. Sooriyakumaran
Sampath Purushothaman
Terry A. Spooner
R. D. Miller
Robert D. Allen
Robert L. Wisnieff
Keywords:
Semiconductor device fabrication
Dielectric
System on a chip
Nanotechnology
Plasma-enhanced chemical vapor deposition
Photolithography
Manufacturing cost
Copper
Resist
Materials science
Electronic engineering
semiconductor industry
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