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Pulsed Laser Deposition as a Novel Thin Film Preparation Method for Silicon-Based Field Effect Sensors
Pulsed Laser Deposition as a Novel Thin Film Preparation Method for Silicon-Based Field Effect Sensors
1995
Schoning
Schaub
Zundel
Beckers
Schubert
Zander
Kordos
Luth
Keywords:
Biosensor
Pulsed laser deposition
Materials science
Capacitive sensing
Thin film
Optoelectronics
preparation method
Field effect
Logic gate
sensitivity
Correction
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