Characterization of lead zirconate titanate (53/47) films fabricated by a simplified sol-gel acetic-acid route

Lead zirconate titanate [PZT (53/47)] films (around 200 nm thick) were prepared by the sol–gel acetic-acid route, spin-coating onto Si/SiO2/Pt substrates. A simple thermal annealing program rendered complete crystallization to the perovskite phase and full removal of the organic material. The 53/47 film composition was attained in the bulk, however, X-ray photoelectron spectroscopy detected a different titanium/zirconium ratio at the film surface. Hysteresis loops were measured using a film-tester constructed at our laboratory. The single-annealed films showed a high resistive leakage. A second annealing cycle led to a better film densification and a marked reduction in surface roughness, significantly enhancing the ferroelectric response. Ferroelectric domains were mapped by piezoresponse force measurements. The relatively-simple experimental procedure applied allowed the fabrication of good quality ferroelectric films.