Defect inspection device and substrate production system using the same

The present invention provides a defect inspection apparatus and using the substrate manufacturing system of the defect inspection apparatus, wherein the defect inspection apparatus comprising: an illumination unit, which can change the angle of incidence of the illumination light to a subject; and a light receiving portion, which change detection angle may be received by the light of the subject irradiated with illumination light of the illumination portion, the light emitted from the light-receiving portion is substantially the same direction as the incident direction of the illumination light from the illumination portion from the subject.