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Nondestructive detection of nano grating by generalized ellipsometer
Nondestructive detection of nano grating by generalized ellipsometer
2014
Ma Zhi-chao
Xu Zhi-mou
Peng Jing
Sun Tang-you
Chen Xiu-guo
Zhao Wen-Ning
Liu Si-Si
Wu Xing-hui
Zou Chao
Liu Shi-yuan
Keywords:
Optoelectronics
Ellipsometry
Materials science
nano grating
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