Method of forming a radiation-sensitive resin composition and the interlayer insulating film

The present invention, [A] an alkali-soluble resin, about [B] 1,2-quinonediazide compound and [C] The radiation-sensitive resin composition containing a radical scavenger. The above radiation-sensitive resin composition satisfies various performances normally required as an interlayer insulating film such that light transmittance is high, and heat dimensional stability due to the efficiency of the process for improving yield of product , heat discoloration resistance, together with an interlayer insulating film excellent in adhesion to a substrate, and the like can be given with high resolution, excellent in storage stability.